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Procedure for Cleaning the
Surface
The purpose of this procedure is to produce a sample surface which is
free of contaminants, and has a well-ordered crystalline structure.
- The vacuum chamber's ion pump (figure 4.1) was
isolated from the chamber using a gate valve, and switched off, to
protect the pump from saturation with argon.
- The sample was placed, according to the procedure in appendix
A.1, in a position which had previously been
determined as being in the
path of the ion beam from a commercial argon ion sputtering gun
(section 4.2,) with the sample's exposed
face toward
the gun.
- The ion energy from the ion gun was set to
.
- The gas inlet valve of the ion gun was opened until the
pressure in the chamber, as revealed by the ion gauge (figure
4.1,) was
.
- On some occasions, a visual check was made for a blue glow at
the sample surface, which would confirm that the ion beam was
reaching the surface.
- The sputtering process was allowed to continue for
.
- The gas inlet valve of the ion gun was closed.
- The power supply that provided the ion energy was switched off.
- When the pressure in the chamber, as revealed by the ion gauge
(figure 4.1,) had dropped to less than
,
the ion pump was switched on.
- The valve between the ion pump and the chamber was opened, and
the ion pump was switched on.
- A current of
, through the sample
heating filament (figure 4.5,) was switched on.
- When the sample temperature, as revealed by the sample
thermocouple, exceeded
, the current through the sample
heating filament was switched off.
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Daniel Christopher Hatton
2004-11-30